Silica-on-silicon waveguides and related fabrication methods
US8818146B2 · kind B2 · utility
11Cited by
5References
21Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 12, 2012 |
| Grant date | Aug 26, 2014 |
| Priority date | — |
| Expiry date | Apr 16, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/136
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a waveguide eliminates a prior art reflow step and introduces certain new steps that permit fabricating of an ultra-low loss waveguide element on a silicon chip. The ultra-low loss waveguide element may be adapted to fabricate a number of devices, including a wedge resonator and a ultra-low loss optical delay line having an extended waveguide length.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.