Patent · US Active

Method for producing a speed sensor element

US8820160B2 · kind B2 · utility

14Cited by
9References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 1, 2009
Grant dateSep 2, 2014
Priority date
Expiry dateAug 16, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/181
  • WIPO fieldOther special machines
  • WIPO sectorMechanical engineering

Abstract

A method for producing a sensor element, wherein at least parts of the sensor element are subjected to at least one plasma treatment process during production. The plasma treatment process may be either a plasma cleaning process and/or a plasma activation process. During the plasma treatment process, a base element and/or a carrier element of the sensor element is subjected to a plasma treatment process before a placement process and/or before a contact-connecting process with electrical connection means. The sensor element is equipped with at least one measurement probe element and/or at least one electronic circuit. This method is used to produce a sensor element, such as a speed sensor element, that may be used in a motor vehicle.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.