Etching Solutions
US8821753B2 · kind B2 · utility
2Cited by
9References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2013 |
| Grant date | Sep 2, 2014 |
| Priority date | — |
| Expiry date | Jan 15, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23F1/14
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The present invention provides an etching solution for silver or silver alloy comprising one at least ammonium compound represented by the formula (1), (2) or (3) below and an oxidant:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.