Method for manufacturing an oxide thin film
US8821967B2 · kind B2 · utility
1Cited by
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11Claims
0Family size
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Key dates
| Filing date | Apr 8, 2011 |
| Grant date | Sep 2, 2014 |
| Priority date | — |
| Expiry date | Feb 7, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/127
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for manufacturing an oxide thin film comprises: providing a coating material composed of a first precursor material, a fuel material and a solvent; coating the coating material on a substrate; and annealing the coated coating material on the substrate to convert the coated coating material into an oxide thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.