Transporting device, in particular for transporting sheet-like substrates through a coating installation

US8821977B2 · kind B2 · utility

Assignee

• First Solar, Inc. · US

Inventors

• Hubertus Von Der Waydbrink · Dresden, DE
• Georg Laimer · Meißen, DE
• Siegfried Scheibe · Dresden, DE
• Ricky C. Powell · Ann Arbor, US
• James Ernest Hinkle · Lambertville, US
• James B. Foote · Toledo, US

Key dates

• Filing date: Sep 7, 2012
• Grant date: Sep 2, 2014
• Expiry date: Sep 7, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6776
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A transport device and method of transporting a substrate using a rotatable shaft and baffles may be used to extend cleaning intervals for the transport device and reduce deposition of a vapor deposition material upon the transport device.