Polymeric materials and methods for making the polymeric materials
US8822123B2 · kind B2 · utility
0Cited by
12References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2012 |
| Grant date | Sep 2, 2014 |
| Priority date | — |
| Expiry date | Jul 13, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0236
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Polymeric materials, methods for making the polymeric materials, and photoresist formulations utilizing the polymeric materials are disclosed. In one aspect, a polymeric material is provided including a condensation product of a reaction mixture comprising an aldehyde with a phenolic monomer composition comprising m-cresol, p-cresol, 3,5-dimethyl phenol, and 2,5-dimethyl phenol. The polymeric material may be further contacted with a photoactive compound and a solvent to form a photoresist formulation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.