Method and apparatus for optically inspecting a test specimen having an at least partly reflective surface
US8823869B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 2, 2012 |
| Grant date | Sep 2, 2014 |
| Priority date | — |
| Expiry date | Aug 2, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8829
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for optically inspecting a test specimen has an at least partly reflective surface including a camera having a number of pixels and an illumination device having a multiplicity of spatially distributed light sources. A workpiece receptacle serves for positioning the test specimen relative to the illumination device and the camera, such that light from the light sources is reflected by the surface to the camera. An evaluation and control unit generates a series of different illumination patterns on the surface, wherein in the course of the series different light sources are switched on. An individual light origin region is determined on the basis of the images recorded by the camera for at least one pixel, whereby the region represents a spatial distribution of individual light contributions generated by the light sources via the surface on the at least one pixel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.