Apparatus and method for inspecting an object
US8823930B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 31, 2013 |
| Grant date | Sep 2, 2014 |
| Priority date | — |
| Expiry date | Jul 31, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8829
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for optically inspecting an object, comprising an object carrier for carrying the object, a pattern generating unit for illuminating the object with a measurement pattern, an image capture unit for capturing a number of images of the object, imaging optics for influencing a light beam path between the object and the image capture unit, and a data processing unit for determining at least one property of the object on the basis of the captured images. The apparatus can be set to at least a first operating distance and a second operating distance, and furthermore has a diffusing unit, which can be changed between an active state, in which the diffusing unit influences the light beam path in front of the pattern generating unit and an inactive state, in which the diffusing unit does not influence the light beam path in front of the pattern generating unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.