Method for calibrating a coordinate measuring machine

US8825427B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Steffen Kunzmann · Dresden, DE
• Tobias Held · Nördlingen, DE
• Thomas Engel · Aalen, DE

Key dates

• Filing date: May 19, 2010
• Grant date: Sep 2, 2014
• Expiry date: Jan 14, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/042
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A reference measurement object having known properties is used for the purpose of calibrating a coordinate measuring machine. A plurality of reference measured values are picked up on the reference measurement object. Calibration data are determined using the reference measured values and using the known properties of the reference measurement object. The calibration data comprises a first number of polynomial coefficients that are selected to correct nonlinear measuring errors using at least one polynomial transformation. The first number of polynomial coefficients is reduced in an iterative method to a lesser second number, with a plurality of pairs of polynomial coefficients being formed and with a polynomial coefficient of a pair being eliminated in each case when a statistical dependence between the polynomial coefficients of the pair is greater than a defined threshold value.