Patent · US Active

Supporting device for a magnetron assembly with a rotatable target

US8828199B2 · kind B2 · utility

0Cited by

4References

15Claims

0Family size

Assignee

VON ARDENNE Anlagentechnik GmbH · DE

Inventors

Goetz Teschner · Gelnhausen, DE
Hans-Jürgen Heinrich · Bad Schwartau, DE
Harald GRUNE · Dresden, DE
Sven Haehne · Dresden, DE

Key dates

Filing date	Nov 30, 2010
Grant date	Sep 9, 2014
Priority date	—
Expiry date	Oct 17, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3435
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A support device for a magnetron arrangement with a rotating target includes a housing with a drive shaft mounted to rotate in the housing. An end of the drive shaft accessible from outside of the housing connects to the rotating target and another end lies within the housing for introduction of a torque. An electric motor with a stator and a rotor is arranged within the housing to generate a torque.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.