Method of making aluminum oxynitride coated article

US8828492B2 · kind B2 · utility

Assignee

• KENNAMETAL INC. · US

Inventors

• Volkmar Sottke · Bad Hersfeld, DE
• Hartmut Westphal · Dermbach, DE
• Hendrikus Van Den Berg · Venlo, NL
• Zhigang Ban · Latrobe, US
• Yixiong Liu · Greensburg, US
• Mark S. Greenfield · Greenville, US

Key dates

• Filing date: Jun 3, 2013
• Grant date: Sep 9, 2014
• Expiry date: Jun 3, 2033

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C22C29/16
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A method for making a coated article wherein the method includes the following steps: providing a substrate; and depositing an aluminum oxynitride coating layer from a gaseous mixture. The gaseous mixture contains the following components: 30.0-65.0 volume percent nitrogen, 0.7-1.3 volume percent aluminum tri-chloride; 1.0-2.0 volume percent ammonia, 0.1-1.5 carbon dioxide, 1.5-4.5 volume percent hydrogen chloride, optional components of carbon monoxide and/or argon, and hydrogen as the balance.