Piezoelectric actuator device
US8829765B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 4, 2011 |
| Grant date | Sep 9, 2014 |
| Priority date | — |
| Expiry date | Mar 11, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/50
Abstract
A piezoelectric actuator device includes a substrate anchor region; a support beam arrangement having first and second ends, wherein the first end is fixed to the anchor region and the second end is freely suspended; first and second beams having first and second ends, wherein the first end of each beam is mechanically fixed to at least a part of the second end of the support beam arrangement and the second end of each beam is freely suspended; a coupling beam mechanically coupling the second end of the first and second beams; wherein the first and second beams are arranged such that the first end of the support beam arrangement is located between the coupling beam and the second end of the support beam arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.