Patent · US Active

Mirror with a mirror carrier and projection exposure apparatus

US8831170B2 · kind B2 · utility

0Cited by

6References

31Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Rutger Wevers · Aachen, DE
Andreas Seifert · Aalen, DE
Joachim Hartjes · Aalen, DE
Guenther Dengel · Heidenheim, DE

Key dates

Filing date	Nov 2, 2007
Grant date	Sep 9, 2014
Priority date	—
Expiry date	Nov 4, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70891
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.