Microelectromechanical gyroscopes and related apparatus and methods
US8833161B2 · kind B2 · utility
3Cited by
18References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2011 |
| Grant date | Sep 16, 2014 |
| Priority date | — |
| Expiry date | Nov 19, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.