Pressure sensor
US8833171B2 · kind B2 · utility
11Cited by
4References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2012 |
| Grant date | Sep 16, 2014 |
| Priority date | — |
| Expiry date | May 16, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.