Multi-vane throttle valve
US8833383B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 16, 2012 |
| Grant date | Sep 16, 2014 |
| Priority date | — |
| Expiry date | Jul 16, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87475
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a plurality of rotatable vanes mounted within the through-opening for controlling a flow of gases through the through-opening where each rotatable vane includes a cooling flow pathway in fluid communication with and disposed longitudinally along each rotatable vane, and a drive mechanism disposed on and connected to an outside of the throttle chamber body for rotating the plurality of rotatable vanes to vary the flow of process gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.