Photo-detecting device and method of making a photo-detecting device

US8835924B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Pierre Gidon · Échirolles, FR
• Benoit Giffard · Grenoble, FR
• Norbert Moussy · Grenoble, FR

Key dates

• Filing date: Jul 5, 2010
• Grant date: Sep 16, 2014
• Expiry date: Sep 27, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F77/206

Abstract

A photo-detecting device including a plurality of pixels, each including at least one alternate stack of photodiodes and electrically conducting electrodes. Each photodiode includes one intrinsic amorphous semiconductor layer in contact with one doped amorphous semiconductor layer distinct from the amorphous semiconductor layers in other photodiodes, and is arranged between two electrodes. Each pair of photodiodes includes one of the electrodes arranged between photodiodes. In each pixel: each electrode includes an electrically conducting portion not superposed on other electrodes of the pixel and electrically connected to one interconnection hole filled with an electrically conducting material; and portions of an electrically conducting material are superposed approximately on each of non-superposed portions of electrodes.