Stackable probe system
US8836357B2 · kind B2 · utility
0Cited by
6References
17Claims
0Family size
Inventors
Key dates
| Filing date | Apr 18, 2012 |
| Grant date | Sep 16, 2014 |
| Priority date | — |
| Expiry date | Nov 30, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53165
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe system includes a plurality of spaced apart height-variable legs, each of which is composed of a stack of blocks magnetically attached to each other, a platen bridging and magnetically secured to the legs, and a probe positioner magnetically attached to the platen. The probe positioner includes an xyz-axes position adjuster mounted on the platen and connected to a first link, a first ball joint interconnecting the first link and a second link, a rotary connector interconnecting the second link and a third link, and a second ball joint connecting the third link to a chuck unit for holding a probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.