Patent · US Active

Inspection device

US8836933B2 · kind B2 · utility

2Cited by

4References

8Claims

0Family size

Assignee

ZIMMERMANN & SCHILP HANDHABUNGSTECHNIK GMBH · DE

Inventors

Michael Schilp · Garching bei München, DE
Josef Zimmermann · Regensburg, DE
Adolf Zitzmann · Regensburg, DE

Key dates

Filing date	May 20, 2013
Grant date	Sep 16, 2014
Priority date	—
Expiry date	May 20, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/0339
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element (1) for supporting a material (3) on the top face of the support element (1), at least one oscillator which is connected to the support element (1) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material (3) hovering on the support element (1), and at least one optical sensor (4). The support element is made of a light-permeable material, and the optical sensor (4) is arranged below the support element (1).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.