Multilayer ceramic structure and method for producing the same

US8840797B2 · kind B2 · utility

Assignees

• Micro Systems Engineering GmbH · DE
• Technische Universität Wien · AT

Inventors

• Thomas Haas · Grand Prairie, US
• Dieter Schwanke · Hof, DE
• Achim Bittner · Heilbronn, DE
• Ulrich Schmid · Wien, AT

Key dates

• Filing date: Jul 6, 2012
• Grant date: Sep 23, 2014
• Expiry date: Jul 6, 2032

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/249953
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A unique and cost-effective method for producing a multilayer ceramic structure by using a first green film that contains a ceramic material, and the multilayer ceramic structure produced thereby. The method including the steps of:(a) producing at least one porous region in the first green film, the at least one porous region extending from the surface of the first green film;(b) applying a first layer, in sections, to the surface of the first green film, wherein one section of the first layer is located above the at least one porous region produced in step (a);(c) positioning at least one additional green film on the surface of the first green film, to which the first layer has been applied;(d) laminating the first green film and the at least one additional green film to form a green film composite; and(e) sintering the green film composite.