Patent · US Active

Chemical sensor with protruded sensor surface

US8841217B1 · kind B1 · utility

66Cited by
251References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 13, 2013
Grant dateSep 23, 2014
Priority date
Expiry dateMar 13, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N27/414
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element on a sidewall of the opening and extending over an upper surface of the dielectric material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.