Method and system for 4D tomography and ultrafast scanning electron microscopy
US8841613B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 16, 2010 |
| Grant date | Sep 23, 2014 |
| Priority date | — |
| Expiry date | Jun 23, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2803
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a first time. The system also includes a laser system and optics operable to direct optical pulses to impinge on the sample. A pulse of the optical pulses impinges on the sample at a second time. The system further includes a detector operable to receive the electron pulses passing through the sample, a controller operable to independently modify an orientation of the stage and at least one of the first time or the second time, a memory operable to store sets of images, and a processor operable to form a 4D tomographic image set from the sets of images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.