Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device

US8842356B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Thilo Sandner · Dresden, DE
• Harald Schenk · Dresden, DE
• Joerg Heber · Dresden, DE
• Thomas Klose · Althengstett, DE
• Andreas Bergmann · Berlin, DE
• Christian Gerwig · Radebeul, DE
• Thomas Knieling · Dresden, DE

Key dates

• Filing date: Feb 29, 2012
• Grant date: Sep 23, 2014
• Expiry date: Oct 20, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0816
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.