Yaw-rate sensor and method for operating a yaw-rate sensor

US8844357B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rolf Scheben · Stuttgart, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Thorsten Balslink · Kirchentellinsfurt, DE
• Daniel Christoph Meisel · Pittsburgh, US
• Benjamin Schmidt · Stuttgart, DE

Key dates

• Filing date: Nov 11, 2011
• Grant date: Sep 30, 2014
• Expiry date: Aug 24, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.