Patent · US Active

Beam regulating apparatus for an EUV illumination beam

US8853642B2 · kind B2 · utility

0Cited by

4References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Ralf Arnold · Aalen, DE
Ulrich Mueller · Hamburg, DE

Key dates

Filing date	Mar 15, 2013
Grant date	Oct 7, 2014
Priority date	—
Expiry date	Mar 15, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/7085
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A beam regulating apparatus for an EUV illumination beam has a position sensor device and a control/regulating device, which is signal-connected to the position sensor device. Furthermore, at least one beam regulating component which influences the beam path of the illumination beam is signal-connected to the control/regulating device. The position sensor device has at least one diffraction grating for generating at least two reference partial beams from the illumination beam. Furthermore, the position sensor device has a respective position sensor assigned to one of the reference partial beams, for detecting the assigned reference partial beam. This results in a beam regulating apparatus which enables well-controllable illumination in conjunction with a simple construction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.