MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
US8854149B2 · kind B2 · utility
2Cited by
17References
21Claims
0Family size
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Key dates
| Filing date | Sep 14, 2012 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Nov 15, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.