Display device provided with MEMS light valve and forming method thereof
US8854712B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2011 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Dec 29, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/031
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.