Adhesion enhancement of thin film PZT structure
US8854772B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2013 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | May 3, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/837
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microactuator, for example for a disc drive, comprising a substrate, a sandwich structure on the substrate, and a passivation layer over the substrate and the sandwich structure. The sandwich structure has a bottom electrode formed from noble metal, a piezoelectric layer, and a top electrode formed from noble metal. The microactuator further has one or both of a bottom adhesion layer present between the bottom electrode and the passivation layer, and a top adhesion layer present between the top electrode and the passivation layer. That is, the microactuator may have only the bottom adhesion layer, only the top adhesion layer, or both the bottom adhesion layer and the top adhesion layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.