Apparatus for generating dielectric barrier discharge gas
US8857371B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2007 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Oct 9, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32724
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for generating a dielectric-barrier discharge gas including a high-energy radical gas, at a high density and with high efficiency. A flat-plate-like first electrode and a flat-plate-like second electrode are arranged in opposite positions, and a dielectric body is arranged between the two electrodes. A discharge space is located between the first electrode and the dielectric body, within a gap between the first electrode and the dielectric body. The discharge space has three sides which are gas shielded and a fourth side which opens to end surfaces of the first electrode and the dielectric body. A cooling section cools at least the first electrode and a gas supply section supplies a raw material gas to the discharge space part. A dielectric-barrier discharge is generated in the discharge space part by applying an AC voltage to the first electrode and the second electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.