Apparatus and method of fabricating flat panel display device
US8858859B2 · kind B2 · utility
4Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2011 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Nov 2, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1944
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Disclosed are an apparatus and method for fabricating a flat panel display device to realize easy separation of a substrate from an imprinting mold. The apparatus includes an imprinting mold connected to a substrate to form a thin film pattern on the substrate, a first adsorption pad to vacuum-adsorb the center of the imprinting mold, a second adsorption pad to vacuum-adsorb the periphery of the imprinting mold, and a connector connected to vacuum pins to vertically move in different regions of the first and second adsorption pads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.