Electrostatic actuator of a mobile structure with improved relaxation of trapped charges
US8860283B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 27, 2012 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Aug 19, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/038
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.