MEMS device and methods for manufacturing and using same
US8861062B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2012 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Nov 2, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/058
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of silicon-on-insulator (SOI) substrate, wherein each rotor tooth belonging to the first plurality of rotor teeth is formed in a first layer and each rotor tooth of the second plurality of rotor teeth is formed in a second layer; and a stator comprising a first plurality of stator teeth and a second plurality of stator teeth, formed in at least two layers of SOI substrate, wherein each stator tooth belonging to the first plurality of stator teeth is formed in a first layer, and each stator tooth of the second plurality of stator teeth is formed in a second layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.