Asymmetrical deformable diffractive grating modulator
US8861067B2 · kind B2 · utility
0Cited by
15References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 10, 2013 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Jan 10, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for modulating light using a micro-electro-mechanical structure includes providing a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements is comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.