Device containing plurality of smaller MEMS devices in place of a larger MEMS device

US8861218B2 · kind B2 · utility

Assignee

• Cavendish Kinetics, Inc. · US

Inventors

• Charles G. Smith · Kalamazoo, US
• Richard L. Knipe · McKinney, US
• Vikram Joshi · Los Gatos, US
• Roberto Gaddi · Rosmalen, NL
• Anartz Unamuno · Dresden, DE
• Robertus Petrus Van Kampen · 's-Hertogenbosch, NL

Key dates

• Filing date: Nov 9, 2009
• Grant date: Oct 14, 2014
• Expiry date: May 10, 2032

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2207/053
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.