MEMS microphone
US8861312B2 · kind B2 · utility
4Cited by
93References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2008 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Apr 13, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R19/04
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS microphone comprising:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.