Integrated cross-tester analysis and real-time adaptive test
US8862424B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 5, 2012 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Sep 5, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/3191
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Processing test results from a plurality of individual semiconductor testers by analyzing each test result at an adaptive test engine. A centralized system jointly analyzes all the test results from the plurality of individual semiconductor testers. The adaptive test engine or the centralized system identifies, based on the analysis of each test result or the joint analysis of all the test results, one or more of: a test environmental issue, a tester variability issue, a tester calibration issue, a product variability issue, and a manufacturing process variability issue. The adaptive test engine or the centralized system determines whether one or more of the plurality of individual semiconductor testers causes one or more of the identified issues or whether semiconductor products tested by the plurality of individual semiconductor testers causes one or more of the identified issues.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.