Optical MEMS scanning micro-mirror with speckle reduction
US8864316B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Apr 28, 2010 |
| Grant date | Oct 21, 2014 |
| Priority date | — |
| Expiry date | Dec 10, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B21/28
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101) pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror; —an transparent prism (500, 600) substantially covering the reflection side of the micro-mirror; —wherein said prism has its outer face non-parallel to the micro-mirror neutral plane N-N, thereby providing a dual anti-speckle and anti-reflection effect, namely against parasitic light. The invention also provides the corresponding micro-projection system and method for reducing speckle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.