Method for manufacturing three-dimensionally shaped comb-tooth electret electrode
US8865498B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2013 |
| Grant date | Oct 21, 2014 |
| Priority date | — |
| Expiry date | Aug 16, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G7/025
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for manufacturing a three-dimensionally shaped comb-tooth electret electrode, provided with positive ions, includes: forming a three-dimensional movable comb-tooth electrode and a three-dimensional fixed comb-tooth electrode from an Si substrate; contacting a vapor including ions thereto, and forming an oxide layer including ions upon surfaces of the comb-tooth electrodes with heat applied thereto; and applying a voltage between the movable electrode and the fixed electrode with heat applied thereto, and thereby causing the ions included in the oxide layer to shift to a surface of the oxide layer; wherein, the voltage between the movable electrode and the fixed electrode is changed, so that the operation of each of the comb-teeth of the movable electrode being alternatingly pulled in against two opposed comb-teeth of the fixed electrode is repeated, and the pulling in voltage and the pulled-in state release voltage are gradually increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.