Patent · US Active

MEMS microphone and method for producing the MEMS microphone

US8865499B2 · kind B2 · utility

5Cited by

2References

20Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Wolfgang Pahl · Munich, DE
Hans Krueger · Munich, DE
Gregor Feiertag · Munich, DE
Alois Stelzl · Munich, DE
Anton Leidl · Munich, DE
Stefan Seitz · Windach, DE

Key dates

Filing date	Jul 7, 2011
Grant date	Oct 21, 2014
Priority date	—
Expiry date	Aug 18, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH04R1/38
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

The invention relates to a method for producing a microphone, in which a transducer element (WE) is mounted on a carrier (TR); a cover is arranged over the transducer element (WE) and the carrier (TR) such that the transducer element (WE) is enclosed between the cover and the carrier (TR); a first sound inlet opening (S01) is produced in the carrier (TR); a functional test of the microphone is carried out; the first sound inlet opening (S01) is closed; and a second sound inlet opening (S02) is created in the cover. The present invention further relates to a microphone resulting from the method, in which the first sound inlet opening (S01) is prepared but closed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.