Silsequioxane-titania hybrid polymers
US8865845B2 · kind B2 · utility
0Cited by
8References
13Claims
0Family size
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Key dates
| Filing date | Oct 25, 2006 |
| Grant date | Oct 21, 2014 |
| Priority date | — |
| Expiry date | Oct 26, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0757
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to silsesquioxane-titania hybrid polymers, wherein the titania domain size is less than about five nanometers. Such polymers are useful, for example, to form anti-reflection coatings in the fabrication of microelectronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.