Laser processing device and laser processing method
US8867113B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2009 |
| Grant date | Oct 21, 2014 |
| Priority date | — |
| Expiry date | May 30, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2240/51
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser processing device includes a laser light source, a spatial light modulator, a control section, and a condensing optical system. The spatial light modulator, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. The control section causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.