Patent · US Active

Low drift scanning probe microscope

US8869310B2 · kind B2 · utility

2Cited by

23References

15Claims

0Family size

Assignee

Bruker Nano, Inc. · US

Inventors

Anthonius Ruiter · Goleta, US
Henry Mittel · Lompoc, US

Key dates

Filing date	Mar 21, 2011
Grant date	Oct 21, 2014
Priority date	—
Expiry date	Oct 14, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01Q70/04
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A scanning probe microscope, such as an atomic force microscope, include a z-stage and a bridge structure comprised substantially free of Invar. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. A drift compensation system is provided to reduce thermal drift of the z-stage and the bridge. The drift compensation system includes heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.