Method and structure of an inertial sensor using tilt conversion
US8869616B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2011 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Jul 27, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0825
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and structure for fabricating an inertial sensing device using tilt conversion to sense a force in the out-of-plane direction. The method can include forming anchor structure(s) coupled to portions of a surface region of a substrate member. Also, the method can include forming flexible anchor members coupled to portions of the anchor structures and frame structures, which can be formed overlying the substrate. The method can also include forming flexible frame members coupled to portions of the frame structures and movable structures, which can also be formed overlying the substrate. Forming the movable structures can include forming peripheral and central movable structures, which can be coupled to flexible structure members. Peripheral movable structures having flexible tilting members can convert a pure tilting out-of-plane motion to a pure translational out-of-plane motion. The forming of these elements can include performing an etching process on a single silicon material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.