(Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound
US8871304B2 · kind B2 · utility
1Cited by
24References
8Claims
0Family size
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Key dates
| Filing date | Nov 2, 2011 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Nov 2, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/381
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention relates to an (amide amino alkane) metal compound represented by the formula (1):wherein
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.