Sensing environmental parameter through stress induced in IC
US8872290B2 · kind B2 · utility
2Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2009 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Jun 23, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/183
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor is provided for sensing a value of a physical parameter characteristic of the sensor's environment. The sensor is implemented in semiconductor technology. A behavior of the sensor's electronic circuitry is affected by stress. The stress is induced by a film covering the circuitry or only part thereof. The stress is caused by the film's material, whose dimensions depend on a value of the parameter. This dependence is different from the 5 dependence of the circuitry's substrate on the same parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.