Wafer test cassette system
US8872532B2 · kind B2 · utility
5Cited by
19References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2010 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Sep 11, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/3025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Wafer cassette systems and methods of using wafer cassette systems. A wafer cassette system can include a base and a probe card assembly. The base and the probe card assembly can each include complementary interlocking alignment elements. The alignment elements can constrain relative movement of the base and probe card assembly in directions parallel to a wafer receiving surface of the base, while permitting relative movement in a direction perpendicular to the receiving surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.