Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor
US8872604B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 2011 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Jan 19, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/028
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A device includes: a first electrode having a first electrode thickness; a first acoustic propagation layer disposed on the first electrode, the first piezo-electric layer having a first acoustic propagation layer thickness; a second electrode having a second electrode thickness; a second piezo-electric layer disposed on the first electrode, the second piezo-electric layer having a second acoustic propagation layer thickness; and a third electrode having a third electrode thickness, wherein the second electrode thickness is between 1.15 and 1.8 times the first electrode thickness. The first and third electrode thicknesses may be equal to each other, and the first and second piezo-electric layer thicknesses may be equal to each other. The first and third electrodes may be connected together to provide two acoustic resonators in parallel with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.