Systems and methods for correcting optical reflectance measurements
US8873035B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2011 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Feb 4, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/3155
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
We disclose measurement systems and methods for measuring analytes in target regions of samples that also include features overlying the target regions. The systems include: (a) a light source; (b) a detection system; (c) a set of at least first, second, and third light ports which transmit light from the light source to a sample and receive and direct light reflected from the sample to the detection system, generating a first set of data including information corresponding to both an internal target within the sample and features overlying the internal target, and a second set of data including information corresponding to features overlying the internal target; and (d) a processor configured to remove information characteristic of the overlying features from the first set of data using the first and second sets of data to produce corrected information representing the internal target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.