Technique to determine mirror position in optical interferometers
US8873125B2 · kind B2 · utility
2Cited by
7References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2011 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Feb 8, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02071
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable mirror. An electrostatic MEMS actuator is coupled to the moveable mirror to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable mirror based on the current capacitance of the MEMS actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.