Reduction of the dynamic deformation of translational mirrors using inertial masses

US8873128B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Technische Universitaet Dresden · DE

Inventors

• Holger Conrad · Dresden, DE
• Thomas Grasshoff · Dresden, DE
• Denis Jung · Dresden, DE
• Thilo Sandner · Dresden, DE

Key dates

• Filing date: Jul 6, 2010
• Grant date: Oct 28, 2014
• Expiry date: May 8, 2031

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/051
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.